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Mai 2013
Özgür Tan
Characterization of Micro- and Nanometer Resolved Technical Surfaces with Function-oriented Parameters
Charakterisierung von Mikro- und Nanometer aufgelösten technischen Oberflächen mit funktionsorientierten Kenngrößen
The structural properties of technical surfaces become more important in the applications of micro and nanotechnology. The possible relationships between geometrical properties of technical surfaces and their functional behavior are commonly investigated by functional tests. Although functional tests may provide correlations between the measured variable and the functional behavior of products, available information is not always sufficient to understand reasons for the lack of functionality and they are not always enough to control manufacturing processes. New approaches are required to evaluate measurement results in a function-oriented way.
In this thesis, based on the analysis of technical functions and description of surfaces with parameters, the informative value of measurement results is investigated. Moreover, surfaces are characterized with function-oriented parameters to predict the behavior of products. The scientific method is described in a general way but its application is shown in a case study. In order to verify the proposed methodology, the wettability of technical surfaces is investigated and it is characterized with functionoriented parameters.
In this thesis, based on the analysis of technical functions and description of surfaces with parameters, the informative value of measurement results is investigated. Moreover, surfaces are characterized with function-oriented parameters to predict the behavior of products. The scientific method is described in a general way but its application is shown in a case study. In order to verify the proposed methodology, the wettability of technical surfaces is investigated and it is characterized with functionoriented parameters.
Schlagwörter: Surface metrology; optical metrology; manufacturing metrology; measurement; ISO 25178; Siemens-Star; 3D metrology
Berichte aus dem Lehrstuhl Qualitätsmanagement und Fertigungsmesstechnik, Friedrich-Alexander-Universität Erlangen-Nürnberg
Herausgegeben von Prof. Dr.-Ing. Dr.-Ing. E.h. Dr. h.c. mult. A. Weckenmann, Erlangen-Nürnberg
Band 27
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